In the past few years, the LSU group has carried out multi-million particle molecular dynamics (MD) simulations to investigate properties and processes in novel ceramic materials, atomic-level stresses in silicon/silicon nitride nanopixels, hypervelocity impact damage in thermal-barrier coatings, and nanoindentation in ceramics. A couple of these simulations are presented below.
Dynamic Fracture in Nanophase Ceramics
Advanced ceramics such as Si3N4, SiC, SiO2, and Al2O3 are highly desirable materials for applications requiring extreme operating conditions. Light weight, elevated melting temperatures, high strengths, and wear and corrosion resistance make them very attractive for applications in aeronautics, automotive, electronics, and advanced manufacturing industries. The only serious drawback of ceramics is that they are brittle at low to moderately high temperatures.
In recent years a great deal of progress has been made in the synthesis of ceramics that are much more ductile (and metals that are harder) than conventional coarse-grained materials. These so called nanophase materials are fabricated by in-situ consolidation of nanometer size clusters. Despite a great deal of research, many perplexing questions concerning nanophase ceramics remain unanswered. Experiments have yet to provide information regarding the morphology and dynamics of cracks or why nanophase materials fracture much more gracefully than crystalline ceramics with the same chemical constituents.
Using large-scale MD simulations, we have investigated the morphological and dynamic aspects of fracture in nanophase Si3N4. We find that the critical strain at which the nanophase system fractures is enormous compared to the strain crystalline Si3N4 can sustain. This is due to: i) plastic deformation in interfacial regions; ii) deflection and arrest of cracks by nanoclusters; and iii) multiple crack branching. None of these mechanisms are operative in the crystalline system. This demonstrates the dramatic effect of nanostructures on fracture in nanophase ceramics.
Simulation of Internal Stresses at Semiconductor/Dielectric Interfaces
In silicon and gallium arsenide semiconductor technology, the use of SiO2 and Si3N4 thin films as dielectrics, encapsulation layers or mask layer is ubiquitous. One of the main issues concerning as-grown processed semiconductor devices is stress/strain distributions in dielectric layers and semiconductor structures as a function of the pixel size. Device pixellation and isolation create edge and corner stresses that are highly inhomogeneous, evolve with the device processing step (and hence each processing step can be impacted by the preceding steps), and in the final configuration, impact the electronic behavior and long-term reliability of the device.
Historically, stress related problems in semiconductor (mostly Si) technology have been dealt with in terms of the classical linear elasticity theory of continuum bodies with the aid of the finite-element method (FEM). However, as the minimum feature size in Si integrated circuit (IC) technology approaches the nanometer regime, the applicability of the FEM to examining stress (particularly at the edges and corners) becomes highly questionable. The impact of the discrete atomic nature of the system on such stresses and of such stresses, in turn, on stabilizing local atomic configuration, needs to be self-consistently examined.
Recently we have performed 10-million-atom MD simulations to investigate the atomic level stress/strain distributions in Si/Si/Si3N4 nanopixels, see Figures 7 and 8. These simulations provide insight into the nature and degree of stresses in mesas as a function of temperature, density and stoichiometry of the dielectric films.
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Multi-scale Algorithms for Materials Simulations
Large-scale simulations discussed above have been performed with:
Efforts are underway to develop a novel multi-scale simulation approach which will combine the electronic structure, MD, and finite-element methods (Fig. 9) to study the mechanical behavior of materials at mesoscopic length scales.
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